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  • Research and Comparative Analysis of the Measurement Capabilities of the Interference, Confocal and Near-Field Microscopy

Research and Comparative Analysis of the Measurement Capabilities of the Interference, Confocal and Near-Field Microscopy

Student: Minkov Kirill

Supervisor: Yury Zolotarevsky

Faculty: HSE Tikhonov Moscow Institute of Electronics and Mathematics (MIEM HSE)

Educational Programme: Measuring Technologies of Nanoindustry (Master)

Year of Graduation: 2016

In this paper, the object of study are the measurement capabilities of the interference, confocal and near-field microscopy and metrologically certified measures. Purpose - a comparative analysis of measurement capabilities of the interference, confocal and near-field microscopy and rational examination of their applications.

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