Year of Graduation
Characterization of Ultrathin Superconducting Films NbN, Obtained by Reactive Magnetron Sputtering, and the Creation on their Basis of Single-Photon Detectors
Research paper is devoted to the study of methods for creating and structuring ultrathin superconducting films. The aim of the study is to create a process route and experimental superconducting single-photon detector itself. The detector is made from a thin (thickness of 4 nm) and nano-sized superconducting film strip of NbN (width 116 nm), formed in a meander shape. Meander is located between the copper contacts on a substrate of silicon with a layer of oxidized silicon area of 3x4 mm2. To create the detector we applied reactive magnetron sputtering, resistive evaporation, electron beam evaporation, as well as optical and electron beam lithography. As the result of the study it was established the process route of superconducting single-photon detectors and obtained an experimental batch of devices. In addition, research on the development of process route was launched, and the establishment of experimental circuits «Boson Sampling» with integrated SSPD. Research paper contains 3 chapters, 58 pages, 36 pictures, 3 tables, 35 sources.