Chemical Sputtering of Polymers by Oxygen Plasma

Student: Omarov Bakhtiyar

Supervisor: Lev Novikov

Faculty: HSE Tikhonov Moscow Institute of Electronics and Mathematics (MIEM HSE)

Educational Programme: Applied Physics (Master)

Final Grade: 8

Year of Graduation: 2017

The object of the research is the effect of the flow of atomic oxygen on polymer materials. The purpose of the work is to study and obtain new data, perform calculations, compare and clarify their degree of agreement with experimental data on the effect of AK fluxes on polymer materials. The structure of the work consists of reference, three chapters, eleven subchapters, conclusions and a list of used literature. In the introduction, the relevance of the topic, the goals and objectives set in the thesis work, the object and subject of the study are determined. In conclusion were drawn about the work done and summarized the study. In the work 7 tables, 23 figures are used, 51 sources are in the list of used literature. The total amount of the thesis is 56 pages

Full text (added May 14, 2017)

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