Optimization of the Geometry of a Thin-film Meander in Order to Obtain Structures with a Uniform Thermal Field

In this work, the object of study is a thin-film meander installed in gas detection sensors. The purpose of the work is to analyze the process of heating a thin-film meander under the influence of an electric current flowing through it. In the process, the principle of operation of a gas detection sensor, the principle of heating a thin-film meander in this device, and the process of electric current flowing through the meander were studied. The main design problems of the heating element that caused overheating were identified, a meander model was developed in the COMSOL program and electrical thermal modeling was carried out. As a result of the work, an optimal model of a thin-film meander was developed on which the thermal field is distributed evenly and without overheating. The results of the work may be applicable in the design of models of gas detection sensors.