Research of Structure and Properties of Thin-film Coatings for Special Purposes

The literature review of this thesis was carried out the analysis of thin film technology. To study the structure and properties of the sprayed surface, the requirements that apply to them. The models of thin film growth, and analyzed the dependence of the properties and structure of the films obtained from the properties of the substrate. Studied by electron-beam evaporation. Ti sputtering technique has been studied in the framework of the experimental section on the substrate Mo. Ti complex obtained films studies were conducted to identify the dependence of the properties and structure of the film on the substrate temperature at the time of spraying. Made a study using X-ray diffraction analysis. The research on the roughness of the film surface. The structure of the sputtered targets and identified the presence of impurities with the help of scanning electron microscopy.