Methods and Tools for Metrological Support of Atomic Force Microscopy for 3D Surface Relief in the Nanometer Range

Annotation This study presents the research results of methods and tools for metrological support of atomic force microscopy (AFM) for 3-D surface relief in the nanometer range. There are Consider the main structural schemes and operation principles of various microscopes, and investigate the methods of their operation. There are analyzed the design features of the equipment necessary for measurements, the principles of construction and operation of AFM, also various calibration measures . I detected The advantages and disadvantages of tools for the study of the surface relief in the nanometer range, and developed the technique of calibration AFM. The purpose of the scientific work is to select a method and means of measurements for developing an AFM calibration method in the nanometer range and to experimentally obtain an image of graphite atoms with a calibrated AFM. Results - Based on the conducted studies, there was developed an unparalleled methodology for calibrating AFM in the nanometer range, on the basis of which it became possible to obtain images of graphite atoms; - there were investigated reconstruction methods of the image for studying the 3-D surface relief in the nanometer range ; - also the factors influencing the accuracy of measurements of the geometric parameters of the surface relief in the nanometer range by atomic force microscopy methods was analyzed in detail, and there were investigated metrological characteristics of the calibration measures ; - there were carried out Experimental studies of the developed calibration method on the selected equipment of the AFM. Conclusions - the method of atomic force microscopy in combination with the developed calibration method can be successfully used to measure the geometric parameters of nanoobjects at the atomic level, which was convincingly confirmed experimentally in this paper by the example of visualization of images of graphite atoms.