Methods and Means of Interference Microscopy Metrological Assurance for 3D-metry of Surface Relief in Nano- and Micrometric Ranges

This work is aimed at research and comparative analysis of existing approaches and methodologies of roughness parameters measurements of surfaces at micrometer scales. The state of modern normative and methodological basis since approximately 1930 for surface relief and roughness parameter estimations has been examined and an analysis carried out of the system for unit of length transfer in the area of roughness parameter measurements based on verification scheme, complex of primary and working reference standards and measurement systems. Principal types and constructive features of interferometric microscopy facilities used for non-contact surface relief examination and methodology for measuring roughness parameters have been examined. Comparative measurements of surface roughness reference materials using several measuring facilities have been carried out. Selecting a method and measuring facility which on one hand meet the requirements of non-contact measurement of relief parameters and roughness that do not damage the surface, and on the other hand are sufficiently precise and efficient for to be suitable to be used in industrial production.